Patent Application
Utility
App. No. 11/898,697
· Confirmation No. 3573
Substrate processing apparatus and cleaning method therefor
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-01-03 | ABN |
Abandonment | 2 | View | |
| 2010-06-15 | CTRS |
Requirement for Restriction/Election | 2 | View | |
| 2010-06-15 | CTRS |
Requirement for Restriction/Election | 4 | View | |
| 2010-06-15 | FWCLM |
Index of Claims | 1 | View | |
| 2010-06-15 | 1449 |
List of References cited by applicant and considered by examiner | 3 | View | |
| 2010-06-15 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2008-11-20 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2008-10-24 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2008-10-24 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2008-10-24 | FOR |
Foreign Reference | 8 | View | |
| 2008-10-24 | FOR |
Foreign Reference | 12 | View | |
| 2008-10-24 | FOR |
Foreign Reference | 10 | View | |
| 2008-10-24 | FOR |
Foreign Reference | 6 | View | |
| 2008-08-14 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2008-08-13 | PD.FILED.E |
Priority Documents electronically retrieved by USPTO from a participating IP Office | 37 | View | |
| 2007-09-14 | TRNA |
Transmittal of New Application | 3 | View | |
| 2007-09-14 | A.PE |
Preliminary Amendment | 1 | View | |
| 2007-09-14 | SPEC |
Specification | 1 | View | |
| 2007-09-14 | CLM |
Claims | 3 | View | |
| 2007-09-14 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2007-09-14 | SPEC |
Specification | 35 | View | |
| 2007-09-14 | CLM |
Claims | 6 | View | |
| 2007-09-14 | ABST |
Abstract | 1 | View | |
| 2007-09-14 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2007-09-14 | OATH |
Oath or Declaration filed | 3 | View | |
| 2007-09-14 | 136A |
Authorization for Extension of Time all replies | 3 | View | |
| 2007-09-14 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2007-09-14 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2007-09-14 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2007-09-14 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2007-09-14 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2007-09-14 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Toshio Matsubara
Toyama, JAPAN
Satoshi Ueda
Toyama, JAPAN
Hiroyuki Satou
Toyama, JAPAN
Hideto Uchijima
Toyama, JAPAN
Attorneys & Agents of Record
Classification
USPC
134/1
C23C16/4405
C23C16/45565
Prosecution
- Examiner
- MARKOFF, ALEXANDER
- Art Unit
- 1711
- Customer No.
- 53080
- Docket No.
- 079195-0232
- Confirmation No.
- 3573
Foreign Priority
JP 2004-002295
·
2004-01-07
·
JAPAN
Publication
- Pub. No.
- US20080283086A1
- Pub. Date
- 2008-11-20
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 11/898,697
- Filed
- 2007-09-14
- Pub. No.
- US20080283086A1
- Examiner
- MARKOFF, ALEXANDER
- Art Unit
- 1711
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