Patent Assignment
Reel/Frame 016062/0716
Assignment of Assignor's Interest
Recorded: 2005-04-13
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method and Apparatus for Monitoring Tool Performance