Patent Assignment
Reel/Frame 016076/0035
Assignment of Assignor's Interest
Recorded: 2004-12-08
Pages: 3
Assignor
FINK, STEVEN T.
Executed: 2004-12-06
Assignee
TOKYO ELECTRON, LTD.
3-6, AKASAKA 5-CHOME, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method and Apparatus for Improved Baffle Plate