Patent Assignment
Reel/Frame 016093/0119
Assignment of Assignor's Interest
Recorded: 2004-01-30
Pages: 3
Assignors
WADA, YUTAKA
Executed: 2004-01-20
AKATSUKA, TOMOHIKO
Executed: 2004-01-20
SASAKI, TATSUYA
Executed: 2004-01-20
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Method and Device for Polishing