Assignment of Assignor's Interest

Recorded: 2004-12-30 Pages: 4

Assignors

SINGER, WOLFGANG

Executed: 2004-10-26

WANGLER, JOHANNES

Executed: 2004-11-11

SOHMEN, ERIC

Executed: 2004-10-28

Assignee

CARL ZEISS SMT AG

CARL ZEISS STRASSE 22, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Illumination System Having a Nested Collector for Annular Illumination of an Exit Pupil

Patent: 7,312,462 →

Application: 10/930,302 →

Publication: US 2005/0093041

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.