Patent Assignment
Reel/Frame 016117/0550
Assignment of Assignor's Interest
Recorded: 2004-12-17
Pages: 3
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPARTMENT, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Self-Cooling Gas Delivery Apparatus Under High Vacuum for High Density Plasma Applications