Patent Assignment
Reel/Frame 016118/0212
Assignment of Assignor's Interest
Recorded: 2004-08-11
Pages: 3
Assignee
KOYO THERMO SYSTEMS CO., LTD.
229, KABATA-CHO, TENRI-SHI, NARA 632-0084, JAPAN
Covered Property
(1)
Electric Heater for a Semiconductor Processing Apparatus