Patent Assignment
Reel/Frame 016129/0290
Corrective Assignment to Correct the Incorrect Serial Number from 10/686989 to 10/686898. Document Previously Recorded at Reel 015396 Frame 0138.
Recorded: 2004-12-31
Pages: 4
Assignor
SENZAKI, YOSHIHIDE
Executed: 2004-05-21
Assignee
AVIZA TECHNOLOGY, INC.
440 KINGS VILLAGE ROAD, SCOTTS VALLEY, CALIFORNIA, 95066
Covered Property
(1)
Two-Step Atomic Layer Deposition of Copper Layers
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.