Patent Assignment
Reel/Frame 016150/0315
Assignment of Assignor's Interest
Recorded: 2005-01-12
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER,3-6 AKASAKA 5-CHOME,, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Controlling a Material Processing Tool and Performance Data