Patent Assignment
Reel/Frame 016160/0875
Assignment of Assignor's Interest
Recorded: 2005-01-07
Pages: 3
Assignor
TOMOYASU, MASAYUKI
Executed: 2004-12-16
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Method and Apparatus