Patent Assignment
Reel/Frame 016169/0983
Assignment of Assignor's Interest
Recorded: 2005-01-21
Pages: 3
Assignors
YAMAGUCHI, TOMOYO
Executed: 2004-11-16
FUSE, TAKASHI
Executed: 2004-11-16
FUJIMOTO, KIWAMU
Executed: 2004-11-16
HONDA, MASANOBU
Executed: 2004-11-16
NAGASEKI, KAZUYA
Executed: 2004-11-16
KOH, AKITERU
Executed: 2004-11-16
ENOMOTO, TAKASHI
Executed: 2004-11-16
ITO, HIROHARU
Executed: 2004-11-16
KITAMURA, AKINORI
Executed: 2004-11-16
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Method