Patent Assignment
Reel/Frame 016170/0189
Assignment of Assignor's Interest
Recorded: 2005-06-21
Pages: 3
Assignors
SCHUSTER, KARL-HEINZ
Executed: 2005-04-28
ROSTALSKI, HANS-JUERGEN
Executed: 2005-05-03
DODOC, AURELIAN
Executed: 2005-05-02
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Projection Objective of a Microlithographic Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.