Patent Assignment
Reel/Frame 016181/0934
Assignment of Assignor's Interest
Recorded: 2005-06-26
Pages: 2
Assignor
EMER, WOLFGANG
Executed: 2005-06-14
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Method for Adjusting a Projection Objective
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.