Patent Assignment
Reel/Frame 016184/0277
Assignment of Assignor's Interest
Recorded: 2005-01-24
Pages: 7
Assignors
CHEN, LEE
Executed: 2004-12-22
KAMBARA, HIROMITSU
Executed: 2005-01-04
TIAN, CAIZ
Executed: 2004-12-23
NISHIZUKA, TETSUYA
Executed: 2004-12-23
NOZAWA, TOSHIHISA
Executed: 2004-12-23
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Processing System for Treating a Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.