Patent Assignment
Reel/Frame 016213/0061
Assignment of Assignor's Interest
Recorded: 2005-01-21
Pages: 3
Assignors
CHENG, YI-LUNG
Executed: 2004-12-13
CHANG, HONG-JUI
Executed: 2004-12-13
WANG, YING-LANG
Executed: 2004-12-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, R.O.C., TAIWAN
Covered Property
(1)
Teos Deposition Method