Patent Assignment
Reel/Frame 016220/0560
Assignment of Assignor's Interest
Recorded: 2005-05-17
Pages: 3
Assignors
ADEL, MICHAEL E.
Executed: 2005-05-04
SELIGSON, JOEL L.
Executed: 2005-05-04
KANDEL, DANIEL
Executed: 2005-05-04
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Continuously Varying Offset Mark and Methods of Determining Overlay