Patent Assignment
Reel/Frame 016223/0258
Assignment of Assignor's Interest
Recorded: 2005-01-25
Pages: 3
Assignor
BENNER, STEPHEN J.
Executed: 2005-01-18
Assignee
TBW INDUSTRIES INC.
2389 FOREST GROVE ROAD, FURLONG, PENNSYLVANIA, 18925-0336
Covered Property
(1)
Multi-Step, in-Situ Pad Conditioning System and Method for Chemical Mechanical Planarization