Patent Assignment
Reel/Frame 016242/0227
Assignment of Assignor's Interest
Recorded: 2005-01-31
Pages: 3
Assignee
TECH SEMICONDUCTOR SINGAPORE PTE LTD.
NO. 1 WOODLANDS INDUSTRIAL PARK D, STREET 1, SINGAPORE 738799, SINGAPORE
Covered Property
(1)
Real Time Monitoring of Cmp Pad Conditioning Process