Patent Assignment
Reel/Frame 016251/0950
Assignment of Assignor's Interest
Recorded: 2005-02-09
Pages: 3
Assignors
SATO, TOMOHIKO
Executed: 2004-12-16
MONOE, SHIGEHARU
Executed: 2004-12-16
SASAGAWA, SHINYA
Executed: 2004-12-16
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing a Semiconductor Device