Assignment of Assignor's Interest

Recorded: 2005-02-11 Pages: 3

Assignors

ULRICH, WILHELM

Executed: 2005-01-18

FUERTER, GERHARD

Executed: 2005-01-20

GERHARD, MICHAEL

Executed: 2005-01-24

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Projection Objective for Microlithography

Patent: 7,271,876 →

Application: 10/919,376 →

Publication: US 2005/0134826

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.