Patent Assignment
Reel/Frame 016262/0735
Assignment of Assignor's Interest
Recorded: 2005-02-15
Pages: 2
Assignor
CHIBANA, TAKAHITO
Executed: 2005-02-02
Assignee
CANON KABUSHIKI KAISHA
3-30-2 SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Exposure Apparatus and Device Manufacturing Method