Patent Assignment
Reel/Frame 016270/0403
Assignment of Assignor's Interest
Recorded: 2005-02-07
Pages: 2
Assignors
LEE, SEUNG JUN
Executed: 2005-02-04
DOH, SEUNG YONG
Executed: 2005-02-04
PARK, CHUNG HUN
Executed: 2005-02-04
JANG, YOO SEOK
Executed: 2005-02-04
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416 MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
System to and Method of Monitoring Condition of Process Tool