Patent Assignment
Reel/Frame 016271/0026
Assignment of Assignor's Interest
Recorded: 2005-02-15
Pages: 3
Assignors
MERTENS, JEROEN JOHANNES SOPHIA MARIA
Executed: 2005-01-18
VAN MEER, ASCHWIN LODEWIJK HENDRICUS JOHANNES
Executed: 2005-01-18
OTTENS, JOOST JEROEN
Executed: 2005-01-18
VAN GOMPEL, EDWIN
Executed: 2005-01-18
Assignee
ASML NETHERLANDS B.V.
DE RUN 501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Apparatus, Method for Supporting and/or Thermally Conditioning a Substrate, a Support Table, and a Chuck