Patent Assignment
Reel/Frame 016279/0262
Assignment of Assignor's Interest
Recorded: 2005-02-11
Pages: 3
Assignors
OH, HIN
Executed: 2005-01-28
SATO, HIDEAKI
Executed: 2005-01-28
TAKAYAMA, NAOKI
Executed: 2005-01-28
SAKAI, HISANORI
Executed: 2005-01-28
MIMURA, YUICHI
Executed: 2005-01-28
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus