Patent Assignment
Reel/Frame 016279/0932
Assignment of Assignor's Interest
Recorded: 2005-02-10
Pages: 3
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPARTMENT, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Side Rf Coil and Side Heater for Plasma Processing Apparatus