Patent Assignment
Reel/Frame 016281/0026
Assignment of Assignor's Interest
Recorded: 2005-02-15
Pages: 3
Assignors
SAITO, TSUYOSHI
Executed: 2004-12-13
ITOH, HIROMI
Executed: 2005-01-14
KITAZOE, MAKIKO
Executed: 2005-01-18
Assignees
SEMICONDUCTOR LEADING EDGE TECHNOLOGIES, INC.
16-1, ONOGAWA TSUKUBA-SHI, IBARAKI, 305-8569, JAPAN
ULVAC, INC.
2500, HAGISONO CHIGASAKI-SHI, KANAGAWA, 253-0071, JAPAN
Covered Property
(1)
Method of Forming Silicon Nitride Film and Method of Manufacturing Semiconductor Device
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Corrected Form Cover Sheet Assignment Tp Caprrect Assogmee # 2'S Address Previously Recorded on Reel 016281 Frame 0026.
Oct 11, 2005
From: SAITO, TSUYOSHI; ITOH, HIROMI; KITAZOE, MAKIKO
To: ULVAC, INC.; SEMICONDUCTOR LEADING EDGE TECHNOLOGIES, INC.
Reel/Frame 017078/0169 →
Assignment of Assignor's Interest
Oct 9, 2006
From: SEMICONDUCTOR LEADING EDGE TECHNOLOGIES, INC.
To: ULVAC, INC.
Reel/Frame 018379/0656 →