Patent Assignment
Reel/Frame 016284/0094
Assignment of Assignor's Interest
Recorded: 2005-02-18
Pages: 2
Assignors
ARNZ, MICHAEL
Executed: 2005-02-14
GROMER, OSWALD
Executed: 2005-02-17
KLOSE, GERD
Executed: 2005-02-14
STUEHLER, JOACHIM
Executed: 2005-02-17
MANGER, MATTHIAS
Executed: 2005-02-16
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Device for the Range-Resolved Determination of Scattered Light, Operating Method, Illumination Mask and Image-Field Mask
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.