Patent Assignment
Reel/Frame 016293/0885
Conversion
Recorded: 2005-07-21
Pages: 3
Assignor
ASML US, INC.
Executed: 2002-10-04
Assignee
ASML US, LLC
1209 ORANGE STREET, WILMINGTON, DELAWARE, 19801
Covered Property
(1)
Method and System to Interferometrically Detect an Alignment Mark
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jul 21, 2005
From: KREUZER, JUSTIN L.
To: SVG LITHOGRAPHY SYSTEMS, INC.
Reel/Frame 016293/0841 →
Merger
Jul 21, 2005
From: SVG LITHOGRAPHY SYSTEMS, INC.
To: ASML US, INC.
Reel/Frame 016293/0874 →
Merger
Jul 21, 2005
From: ASM LITHOGRAPHY INC. AND ASML US, LLC
To: ASML US, INC.
Reel/Frame 016294/0041 →
Assignment of Assignor's Interest
Jul 21, 2005
From: ASML US, INC.
To: ASML HOLDING N.V.
Reel/Frame 016294/0055 →