Patent Assignment
Reel/Frame 016303/0583
Assignment of Assignor's Interest
Recorded: 2005-02-18
Pages: 4
Assignor
SOLARZ, RICHARD WILLIAM
Executed: 2005-02-16
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Coherent Duv Illumination for Semiconductor Wafer Inspection