Patent Assignment
Reel/Frame 016318/0173
Assignment of Assignor's Interest
Recorded: 2005-02-09
Pages: 2
Assignors
WEGMANN, ULRICH
Executed: 2004-12-21
SCHELLHORN, UWE
Executed: 2004-12-21
KLAESGES, RALPH
Executed: 2005-01-17
STUEHLER, JOACHIM
Executed: 2004-12-22
Assignee
CARL ZEISS SMT G
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Moire Method and Measuring System for Measuring the Distortion of an Optical Imaging System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.