Patent Assignment
Reel/Frame 016322/0284
Assignment of Assignor's Interest
Recorded: 2005-02-22
Pages: 2
Assignors
KOMIYAMA, KIYOSHI
Executed: 2002-03-28
SHIMODA, TAKAHIRO
Executed: 2002-03-28
NISHIKAWA, HIROSHI
Executed: 2002-03-28
Assignee
TOKYO ELECTRON LIMITED
306, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Device and Method for Monitoring Process Exhaust Gas, Semiconductor Manufacturing Device, and System and Method for Controlling Semiconductor Manufacturing Device