Assignment of Assignor's Interest

Recorded: 2005-03-03 Pages: 3

Assignors

DONOHUE, JOHN

Executed: 2005-02-01

YUE, HONGYU

Executed: 2004-06-15

Assignee

TOKYO ELECTRON LIMITED

TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME,, MINATO-KU, TOKYO 107-8481, JAPAN

Covered Property (1)

Method of Fault Detection for Material Process System

Patent: 7,972,483 →

Application: 10/500,005 →

Publication: US 2005/0115824