Patent Assignment
Reel/Frame 016343/0963
Assignment of Assignor's Interest
Recorded: 2005-03-09
Pages: 3
Assignors
TOMOYASU, MASAYUKI
Executed: 2005-02-08
OH, HIN
Executed: 2005-02-08
TANAKA, HIDEKII
Executed: 2005-02-08
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method for Generating Multivariate Analysis Model Expression for Processing Apparatus, Method for Executing Multivariate Analysis of Processing Apparatus, Control Device of Processing Apparatus and Control System for Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.