Patent Assignment
Reel/Frame 016349/0017
Assignment of Assignor's Interest
Recorded: 2005-03-10
Pages: 3
Assignee
KABUSHIKI KAISHA TOSHIBA
1-1, SHIBAURA 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Charged Particle Beam Apparatus, Charged Particle Detection Method, and Method of Manufacturing Semiconductor Device