Patent Assignment
Reel/Frame 016357/0602
Assignment of Assignor's Interest
Recorded: 2005-03-14
Pages: 3
Assignors
VAN HAREN, RICHARD JOHANNES FRANCISCUS
Executed: 2005-02-25
DEN BOEF, ARIE JEFFREY
Executed: 2005-02-25
BURGHOORN, JACOBUS
Executed: 2005-02-25
VAN DER SCHAAR, MAURITS
Executed: 2005-02-25
RIJPERS, BARTOLOMEUS PETRUS
Executed: 2005-02-25
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Marker Structure and Method for Controlling Alignment of Layers of a Multi-Layered Substrate