Patent Assignment
Reel/Frame 016359/0278
Assignment of Assignor's Interest
Recorded: 2005-03-11
Pages: 2
Assignors
NAGATOMO, WATARU
Executed: 2004-11-04
SHISHIDO, CHIE
Executed: 2004-11-08
MOROKUMA, HIDETOSHI
Executed: 2004-11-09
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Monitoring Exposure Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.