Patent Assignment
Reel/Frame 016364/0400
Assignment of Assignor's Interest
Recorded: 2005-03-10
Pages: 4
Assignors
KREMER, ALEXANDER
Executed: 2005-01-28
DIERICHS, MARCEL MATHIJS THEODORE MARIE
Executed: 2005-02-22
LOOPSTRA, ERIK ROELOF
Executed: 2005-02-22
Assignee
ASML NEATHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Uniformity Correction for Lithographic Apparatus