Patent Assignment
Reel/Frame 016364/0678
Assignment of Assignor's Interest
Recorded: 2005-03-10
Pages: 5
Assignors
VAN DER SCHAAR, MAURITS
Executed: 2005-03-02
HUIJBREGTSE, JEROEN
Executed: 2005-03-02
SCHETS, SICCO IAN
Executed: 2005-02-18
SWINNEN, BART LUC
Executed: 2005-02-18
Assignees
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
IMEC V.Z.W.
KAPELDREEF 75, LEUVEN, B-3001, BELGIUM
Covered Property
(1)
Lithographic Apparatus, Method of Determining a Model Parameter, Device Manufacturing Method, and Device Manufactured Thereby