Patent Assignment
Reel/Frame 016373/0416
Assignment of Assignor's Interest
Recorded: 2005-08-09
Pages: 2
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Projection Lens for a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.