Patent Assignment
Reel/Frame 016375/0997
Assignment of Assignor's Interest
Recorded: 2005-03-18
Pages: 2
Assignors
GRUNER, TORALF
Executed: 2005-03-02
KRAEHMER, DANIEL
Executed: 2005-03-02
TOTZECK, MICHAEL
Executed: 2005-03-08
WANGLER, JOHANNES
Executed: 2005-03-15
BROTSACK, MARKUS
Executed: 2005-03-02
DIECKMANN, NILS
Executed: 2005-03-14
GOEHNERMEIER, AKSEL
Executed: 2005-03-09
SCHWAB, MARKUS
Executed: 2005-03-07
FIOLKA, DAMIAN
Executed: 2005-03-09
ZENZINGER, MARKUS
Executed: 2005-03-14
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Microlithographic Exposure Method as Well as a Projection Exposure System for Carrying Out the Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.