Patent Assignment
Reel/Frame 016379/0693
Assignment of Assignor's Interest
Recorded: 2005-03-17
Pages: 3
Assignors
OTTENS, JOOST JEROEN
Executed: 2005-02-22
MERTENS, JEROEN JOHANNES SOPHIA MARIA
Executed: 2005-02-22
DE JONG, FREDERICK EDUARD
Executed: 2005-02-22
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Calibration Substrate and Method for Calibrating a Lithographic Apparatus