Assignment of Assignor's Interest

Recorded: 2005-03-21 Pages: 3

Assignors

HOLDERER, HUBERT

Executed: 2005-03-14

HEMBD-SOELLNER, CHRISTIAN

Executed: 2005-03-11

VON BUENAU, RUDOLF

Executed: 2005-03-11

HAAG, ULRICH

Executed: 2005-03-10

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Projection Method Including Pupillary Filtering and a Projection Lens Therefor

Patent: 7,336,342 →

Application: 10/975,496 →

Publication: US 2005/0146701

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.