Patent Assignment
Reel/Frame 016388/0711
Assignment of Assignor's Interest
Recorded: 2005-03-15
Pages: 3
Assignors
MARUYAMA, JUNYA
Executed: 2005-03-04
ISOBE, ATSUO
Executed: 2005-03-04
OKAZAKI, SUSUMU
Executed: 2005-03-07
TANAKA, KOICHIRO
Executed: 2005-03-07
YAMAMOTO, YOSHIAKI
Executed: 2005-03-07
DAIRIKI, KOJI
Executed: 2005-03-04
TAMURA, TOMOKO
Executed: 2005-03-07
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device