Patent Assignment
Reel/Frame 016391/0112
Assignment of Assignor's Interest
Recorded: 2005-03-23
Pages: 3
Assignors
HATAKEYAMA, MASAHIRO
Executed: 2005-03-04
WATANABE, KENJI
Executed: 2005-03-04
MURAKAMI, TAKESHI
Executed: 2005-03-04
SATAKE, TOHRU
Executed: 2005-03-04
NOJI, NOBUHARU
Executed: 2005-03-04
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO 144-8510, JAPAN
Covered Property
(1)
Sample Surface Inspection Apparatus and Method