Patent Assignment
Reel/Frame 016399/0140
Assignment of Assignor's Interest
Recorded: 2005-03-28
Pages: 5
Assignors
GRUNER, TORALF
Executed: 2005-01-18
FIOLKA, DAMIAN
Executed: 2005-01-18
FURTER, GERHARD
Executed: 2005-01-18
TOTZECK, MICHAEL
Executed: 2005-01-21
ULRICH, WILHELM
Executed: 2005-01-18
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Optical System, in Particular Illumination System, of a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.