Patent Assignment
Reel/Frame 016407/0357
Assignment of Assignor's Interest
Recorded: 2005-03-30
Pages: 4
Assignors
YAMASHITA, ASAO
Executed: 2005-02-02
FUNK, MERRITT
Executed: 2005-02-02
PRAGER, DANIEL
Executed: 2005-02-02
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107, JAPAN
Covered Property
(1)
Iso/Nested Control for Soft Mask Processing