Patent Assignment
Reel/Frame 016445/0463
Assignment of Assignor's Interest
Recorded: 2005-04-07
Pages: 5
Assignors
WAGNER, CHRISTIAN
Executed: 2005-03-11
DE BOEIJ, WILHELMUS PETRUS
Executed: 2005-03-15
HEIL, TILMANN
Executed: 2005-03-11
FIOLKA, DAMIAN
Executed: 2005-03-11
Assignees
ASML NETHERLANDS, B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
CARL ZEIS SMT AG
CARL ZEIS STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Polarized Radiation in Lithographic Apparatus and Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.