Patent Assignment
Reel/Frame 016447/0753
Assignment of Assignor's Interest
Recorded: 2005-04-08
Pages: 2
Assignors
IKEDA, SATOSHI
Executed: 2005-03-25
KAWADA, HIROKI
Executed: 2005-03-15
KOBARU, ATSUSHI
Executed: 2005-03-15
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method of Measurement Accuracy Improvement by Control of Pattern Shrinkage
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.