Patent Assignment
Reel/Frame 016450/0676
Assignment of Assignor's Interest
Recorded: 2005-04-12
Pages: 2
Assignors
SHINMA, KENJI
Executed: 2005-03-25
NAKATA, HIRONHIKO
Executed: 2005-03-25
NATSUHARA, MASUHIRO
Executed: 2005-03-25
Assignee
SUMITOMO ELECTRIC INDUSTRIES, LTD.
5-33, KITAHAMA 4-CHOME, CHUO-KU,, OSAKA-SHI, OSAKA 541-0041, JAPAN
Covered Property
(1)
Semiconductor Manufacturing Apparatus