Patent Assignment
Reel/Frame 016458/0325
Assignment of Assignor's Interest
Recorded: 2005-04-14
Pages: 3
Assignors
KUROKAWA, MASAKI
Executed: 2005-01-20
KIMURA, NORIFUMI
Executed: 2005-01-20
FUJITA, TAKEHIKO
Executed: 2005-01-20
FURUSAWA, YOSHIKAZU
Executed: 2005-01-20
KOMORI, KATSUHIKO
Executed: 2005-01-20
HASEBE, KAZUHIDE
Executed: 2005-01-20
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Film Formation Method and Apparatus for Semiconductor Process